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    橡胶密封热式质量流量计和控制器

    经验证具有极高灵活性,能够满足各种质量流量测量需求。

    布鲁克斯仪器的橡胶密封质量流量计和控制器将工艺所需的准确性、可靠性和可重复性相结合,是一种能够为您提供高精度性能和长期稳定性并且经济有效的测量仪器。结果:使运营投资价值和回报最大化。

    关键应用

    • 化学品与石化分析和试验过程
    • 实验室和分析系统
    • 生命科学实验室
    • 薄膜气相沉积
    • 热处理、切割等其他热过程
    • 真空应用

    选择最适合自身工艺需求的质量流量设备。

    产品

    SLA 系列
    SLA 系列
    GF40 系列
    GF40 系列
    5850E 和 i 系列
    5850E 和 i 系列
    SLAMf 系列
    SLAMf 系列
    4800 系列
    4800 系列
    5700 系列
    5700 系列
    产品类型 Mass Flow Controller Mass Flow Controller Mass Flow Controller Mass Flow Controller Mass Flow Controller Mass Flow Meter
    区别

    Wide Flow & Pressure Range

    Superior Long-term Stability

    High Accuracy

    High Accuracy

    MultiFlo™ Capability

    Compact Size

    Suitable for Full Suite of Gases

    Proven Reliable Performance

    Long Term Stability

    Easy to Change Range and Recalibrate in the Field

    NEMA 4X/IP66 Approved Enclosure

    Perfect for Hose Down/Wash Down Applications

    Hazardous Area Approvals

     

    Ultra-fast Response Times

    Optional Local Operator Interface

    Compact Size

    Suitable for Non-corrosive Gases

    Economical

    Compact

    Ideal Upgrade from Volumetric Devices

    流量范围-满量程容量 .003 - 2500 slpm 3 sccm - 50 slpm

    0 - 1000 slpm

    .003 - 2500 slpm 50 sccm - 40 slpm

    0  - 50 slpm

    密封材料 Elastomer Seal Elastomer Seal Elastomer Seal Elastomer Seal Elastomer Seal

    Stainless Steel

    最大压力

    .003-200 slpm: 1500 psi/103 bar

    100 - 2500 slpm: 1000 psi/70 bar

    Optional 4500 psi/310 bar on 50 slpm max device

    150 psig/10 bar

    Controllers: 1500 psig

    Meters: up to 4500 psig on some models

    Up to 100 lpm: 1500 psi/100 bar

    Up to 50 lpm: 4500psi/310 bar (optional)

    100-2500 lpm:  1000 psi/70 bar

    150 psig/10 barg

    150 psig

    精度

    17025 Certified Devices (Includes linearity, excludes calibration system measurement uncertainty, per SEMI E69)

    ±0.6% of SP (20-100% FS)

    ±0.12% of FS (<20% FS)

    1100 slpm up to 2500 slpm: ±0.6% of FS


    Standard Devices (includes uncertainty from reference standards

    ±0.9% of SP (20-100% FS)

    ±0.18% of FS (2-20% FS)

    1100 slpm up to 2500 slpm: ±1.0% of FS

    1% of FS

    1.5% of FS > 20 slpm

    17025 Certified Devices (Includes linearity, excludes calibration system measurement uncertainty, per SEMI E69)

    ±0.6% of SP (20-100% FS)

    ±0.12% of FS (<20% FS)

    1100 slpm up to 2500 slpm: ±0.6% of FS


    Standard Devices (includes uncertainty from reference standards

    ±0.9% of SP (20-100% FS)

    ±0.18% of FS (2-20% FS)

    1100 slpm up to 2500 slpm: ±1.0% of FS

    3.0% of FS

    1.0% of FS (optional)

    5% of FS including linearity

    重复性

    0.20% SP

    0.20% SP

    0.25% of Rate

    0.20% SP

    0.15% FS

    0.50% FS

    多气体多量程

    Standard

    MultiFlo™ Available

    Standard

    诊断能力 Available

    Available

    Available

    Available

    模拟通讯

    0-5 V, 1-5 V, 0-10 V, 0-20 mA, 4-20 mA

    0-5 V, 0-10 V
    0-20 mA, 4-20 mA

    0-5 Vdc
    0-20 mA
    4-20 mA

    0-5 V, 1-5 V, 0-10 V, 0-20 mA, 4-20 mA



    0-5 Vdc
    4-20 mA

    0-5 V into 1000 ohms or greater

    数字通讯 DeviceNet™
    EtherCAT®
    EtherNet/IP™
    FOUNDATIONTM Fieldbus
    Profibus®
    PROFINET
    RS-485 

    DeviceNetTM
    EtherCAT®
    Profibus®
    RS485


    DeviceNet™
    EtherNet/IP™
    FOUNDATIONTM Fieldbus
    Profibus®
    PROFINET
    RS-485 
    RS232


    大小 Medium Compact Medium Large

    Compact

    Compact

    认证和批准

    ISO/IEC 17025:2005
    CE: EMC Directive 2014/30/EU
    Directive 2011/65/EU

    UL (Recognized):
    Class I, Div 2, Group A, B, C, D
    Class I, Zone 2, IIC T4
    Class II, Zone 22

    ATEX: II 3 G Ex nA IIC T4 Gc

    IECEx: II 3 G Ex nA IIC T4 Gc

    KOSHA: Ex nA IIC T4

    CE: EN61326: 2006 (FCC Part 15 & Canada IC-subset of CE testing)

    Safety EN61010-1

    ISO/IEC 17025:2005

    CE: EMC, RoHs, PED

    UL Listed/Recognized:

    Class 1, Div 2, Group A,B,C,D

    Class 1, Zone 2, IIC T4, Class II, Zone 22

    ATEX:

    II 3 G Ex nA IIC T4 Gc 

    II 3 D Ex tc IIIC T 85°C Dc

    IECEx:

    Ex nA IIC T4 Gc 

    Ex tc IIIC T 85°C Dc 

    KOSHA:

    Ex nA IIC T4

    Ex tc IIIC T85°C Dc

    ATEX Zone 2

    CSA Div 2/Zone 2 (Recognized)

    可下分的棋牌游戏