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压力和真空产品
附件和软件 Cables, Filters, Valves, Secondary Electronics, Software
质量流量控制器和仪表
汽化产品
可变面积流量计(转子流量计)
半导体产品 Ultra-high purity products for the semiconductor industry
对于许多工业和半导体加工过程,性能和成本效率同样重要。GF80 系列金属密封质量流量控制器拥有以下两个特点:设计采用与最畅销的 GF100 系列响应速度相同的传感器以及第四代 MultiFlo™ 专利技术,该产品绝对是高性价比运营的正确选择。另外,金属密封的 MFC 拥有 MultiFloTM 多气体/多量程功能所带来的全部优势,原因是可用气体方面没有限制并且由于不会发生弹性体氧渗透而提升了气体纯度,同时还由于金属密封件有效期相当长而减少了维护工作量。
请与我们的应用工程专家取得联系:
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Mass Flow Controller
±1% S.P. 35-100%
±0.35% F.S. < 5-35%
±0.5% F.S. (included in accuracy)
Normally Closed Valve: <1 sec
< 5% - 100%
Standard GF Series: 11 bins
High Flow GF Series: 4 bins
Standard GF Series: < 1% F.S.
High Flow GF Series: < 4% of Standard Configuration F.S. @ 30psig/atm out N2 equiv.
316 Stainless Steel
Hastelloy C-22
17-7 PH
430SS
KM-45
Normally Closed
Meter (no valve)
3-860 sccm = 7-45 psid
861-7200 sccm = 15-45 psid
7201-50000 sccm = 25-45 psid
51-300 slm = 30-90 psid
(typical pressure drops)
Standard GF Series: 150 psig (10 bar)
High Flow GF Series: Meter = 75 psig (5 bar), Controller = 150 psig (10 bar)
Control Valve Output, Network Interruption
RS485 via 2.5mm jack (all models)
0-20 mA
4-20 mA
0-5 Vdc
0-10 Vdc
DeviceNet™
Profibus®
RS485 S-Protocol
RS485 L-Protocol
RS485 A-Protocol (GF081)
Profibus/Analog via 9-Pin "D" connector
RS485/Analog via 9-Pin"D" connector, 15-Pin "D" connector
DeviceNet™ via 5-Pin "M12" connector
Standard GF Series: RS485 from +12 Vdc to +24 Vdc = 7 Watts max
Profibus from +13.5 Vdc to +27 Vdc = 7 Watts max
DeviceNet™ from +11 Vdc to +25 Vdc = 13.6 Watts max
High Flow GF Series: RS485 from +12 Vdc to +24 Vdc = 3.3 Watts max
Profibus from +13.5 Vdc to +27 Vdc = 3.3 Watts max
DeviceNet™ from +11 Vdc to +25 Vdc = 3.3 Watts max
CE: EN6126: 2006 (FCC Part 15 & Canada IC-subset of CE testing)
Safety EN61010-1
RoHS
High Purity
Low Flow Rate
±0.35% F.S. 2-35%
Normally Closed Valve
<1 sec
Status Lights: MFC Health, Network Status
Alarms: Control Valve Output, Network Interruption
Profibus
Dynamic Data Exchange software allows user to make bi-directional links between Windows® based applications and Brooks Instrument RS485 S-Protocol devices.